Key-Visual SEMICON China 2019
Logo SEMICON China 2019

German Pavilion at
SEMICON China 2019

What is German Pavilion?

20 – 22 March 2019 – Shanghai, P. R. China

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Products and services

I’m looking for German exhibitors

Specialized cutting technologies

Meyer Burger (Germany) GmbH
Booth number: 2671

Thin-film coating

Meyer Burger (Germany) GmbH
Booth number: 2671

MCRT minienvironments and customized filter-fan-units

MCRT Micro Cleanroom Technology GmbH
Booth number: 2670

MCRT enclosures for lithography and metrology systems

MCRT Micro Cleanroom Technology GmbH
Booth number: 2670

MCRT AMC filters

MCRT Micro Cleanroom Technology GmbH
Booth number: 2670

Ultrahigh Vacuum Deposition Platform TIMARIS

Singulus Technologies AG
Booth number: 2774

Universal Sputtering System for Advanced R&D

Singulus Technologies AG
Booth number: 2774

Mobile ElectroStatic Carrier (T-ESC®)

ProTec Carrier Systems GmbH
Booth number: 2573

Fully Automated Chucking Unit (ACU)

ProTec Carrier Systems GmbH
Booth number: 2573

Manual Chucking Unit (MCU 3000)

ProTec Carrier Systems GmbH
Booth number: 2573

RADICAL PLASMA SOURCE MA-SERIES

MUEGGE GmbH
Booth number: 2671

PLASMA ARRAY - SCALABLE PLASMA SOURCE

MUEGGE GmbH
Booth number: 2671

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