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Pressure transducers in semiconductor manufacturing: There’s no way around UHP

Purity
The transducers for semiconductor production are manufactured in an ISO 5 clean room. This is followed by a double-cleaning process to remove production residues: first with distilled water and then isopropanol. After drying, another rinse follows, this time with ultrapure gas. The instrument is then double-bagged before entering customers’ clean room.

Leak tightness
The entire UHP product family has extremely low leakage rates. These are achieved through carefully controlled orbital welding processes. Accordingly we use threaded connections with sealing lips between which a metal seal is placed. It’s made of a softer material than the threaded connection and thus adapts to the contour of the sealing lip.

Material
Due to the required purity in semiconductor production, the UHP pressure transducers must maintain a corresponding surface quality. Electropolishing ensures a smooth, uniform surface of the wetted parts. For this purpose, the workpieces are placed in an electrolyte.

Further reading

Exhibitor: WIKA China

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