German Pavilion at
SEMICON China 2021
17 – 19 March 2021 – Shanghai, P. R. China
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Exhibitors at the German Pavilion – SEMICON China 2021
Selected products
VELION--FIB-SEM for FIB-centric nanofabrication
Raith China Co., Ltd.
Booth number: 2677
AL 76 Compact Microwave Plasma System
ALPHA PLASMA Vertrieb Plasma Systeme
Booth number: 2583
baSiC-T SiCma400/600
PVA Crystal Growing Systems GmbH
Booth number: 2774
Plasma array (large area)
MUEGGE GmbH
Booth number: 2680
Glass Wafer with Through Vias
LPKF Laser & Electronics AG
Booth number: 2579
Bimetal thermometers
AFRISO-EURO-INDEX GmbH
Booth number: 2678
MUEGGE STP - Microwave Plasma System for SU-8 Etching & Photoresist Ashing
MUEGGE GmbH
Booth number: 2680
Stainless steel pressure gauge
AFRISO-EURO-INDEX GmbH
Booth number: 2678
Radical plasma source (Remote Plasma Source / RPS)
MUEGGE GmbH
Booth number: 2680
EBPG Ultra high performance EBL
Raith China Co., Ltd.
Booth number: 2677