German Pavilion at
SEMICON China 2022

ALPHA Plasma supplies microwave plasma systems for wafer fabrication and IC packaging. We provide batch tools as well as automated equipment for processing of individual devices.

We are your partner for wet process equipment. AP&S processing tools cover all common chemical wet processes used in semiconductor production chains.

Lapmaster Wolters is a leading supplier of high-precision machine tools and systems for high tolerance surface processing of nearly any kind of workpiece.

As a leading provider of laser manufacturing solutions, LPKF creates more powerful electronic systems and increase functionality and efficiency for a broad range of applications.

MUEGGE – We are specialized in Isotropic Plasma Technologies: High Density Plasma, Pulsed Plasma, Pure Isotropic Plasma, No Ion Bombardment.

Precision Surfacing Solutions is the global OEM of Lapmaster, Peter Wolters, ELB, aba, REFORM, KEHREN, MICRON, ISOG, and Barnes with decades of experience to its name.

With innovative systems for standard crystal-growing technologies and more than 60 years of experience, we are supporting customers in the production of highpurity monocrystals.

Raith is a leading precision technology solution provider for nanofabrication, EBL, FIB, nanoengineering and reverse engineering applications.

Equipment for surface treatment of semiconductor wafers (etching, plating, cleaning, drying) with standardized machines or customized equipment.

SONOSYS® offers highly sophisticated ultrasonic and megasonic cleaning systems for single-wafer and batch processes in the frequency range from 400 kHz to 9 MHz.

We develop fast ramping laboratory ovens and high precision hot plates, reflow solder ovens, high vacuum MEMS sealers and Semiautomatic wire bonders.

For over 75 years, WIKA has been a globally renowned partner in pressure, temperature, force, level, as well as flow measurement, calibration and SF6 gas solutions.