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German Pavilion at
SEMICON China 2022

What is German Pavilion?

15 – 17 June 2022 – Shanghai, P. R. China

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German Exhibitors

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ALPHA PLASMA Vertrieb Plasma Systeme

ALPHA Plasma supplies microwave plasma systems for wafer fabrication and IC packaging. We provide batch tools as well as automated equipment for processing of individual devices.

AP&S International GmbH

We are your partner for wet process equipment. AP&S processing tools cover all common chemical wet processes used in semiconductor production chains.

Lapmaster Wolters GmbH

Lapmaster Wolters is a leading supplier of high-precision machine tools and systems for high tolerance surface processing of nearly any kind of workpiece.

LPKF Laser & Electronics AG

As a leading provider of laser manufacturing solutions, LPKF creates more powerful electronic systems and increase functionality and efficiency for a broad range of applications.


MUEGGE – We are specialized in Isotropic Plasma Technologies: High Density Plasma, Pulsed Plasma, Pure Isotropic Plasma, No Ion Bombardment.

Precision Surfacing Solutions GmbH & Co. KG

Precision Surfacing Solutions is the global OEM of Lapmaster, Peter Wolters, ELB, aba, REFORM, KEHREN, MICRON, ISOG, and Barnes with decades of experience to its name.

PVA Crystal Growing Systems GmbH

With innovative systems for standard crystal-growing technologies and more than 60 years of experience, we are supporting customers in the production of highpurity monocrystals.

Raith GmbH

Raith is a leading precision technology solution provider for nanofabrication, EBL, FIB, nanoengineering and reverse engineering applications.

RENA Technologies GmbH

Equipment for surface treatment of semiconductor wafers (etching, plating, cleaning, drying) with standardized machines or customized equipment.

SONOSYS Ultraschallsysteme GmbH

SONOSYS® offers highly sophisticated ultrasonic and megasonic cleaning systems for single-wafer and batch processes in the frequency range from 400 kHz to 9 MHz.

UniTemp GmbH

We develop fast ramping laboratory ovens and high precision hot plates, reflow solder ovens, high vacuum MEMS sealers and Semiautomatic wire bonders.

WIKA China

For over 75 years, WIKA has been a globally renowned partner in pressure, temperature, force, level, as well as flow measurement, calibration and SF6 gas solutions.

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