German Pavilion at
SEMICON China 2022
15 – 17 June 2022 – Shanghai, P. R. China
German Exhibitors
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ALPHA Plasma supplies microwave plasma systems for wafer fabrication and IC packaging. We provide batch tools as well as automated equipment for processing of individual devices.
MUEGGE – We are specialized in Isotropic Plasma Technologies: High Density Plasma, Pulsed Plasma, Pure Isotropic Plasma, No Ion Bombardment.
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