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German Pavilion at
SEMICON China 2021

What is German Pavilion?

17 – 19 March 2021 – Shanghai, P. R. China

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German Exhibitors

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ALPHA PLASMA Vertrieb Plasma Systeme

ALPHA PLASMA supplies microwave plasma systems for wafer fabrication and IC packaging. We provide automated equipment for processing of individual devices in optoelectronics.

Booth number: 2583

MUEGGE GmbH

MUEGGE – We are specialized in Isotropic Plasma Technologies: High Density Plasma, Pulsed Plasma, Pure Isotropic Plasma, No Ion Bombardment.

Booth number: 2680

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