ATT offers a wide range of extremely performant, reliable temperature controlled wafer chuck systems for the semiconductor industry.
Booth number: 2674
Worldwide leader in developing and manufacturing vibration isolation and EMI compensation; plus automation solutions for wafer and mask handling for semiconductor OEMs.
Booth number: 2672
Since its founding in 1967 JULABO has consistently set new standards for high-performance and reliable temperature control.
Booth number: 2675
ProTec® – The Gripper for touchless gripping by electrostatic energy field. Based on electrostatic forces we chuck various kinds of substrates, e.g. glass, foil, silicon.
Booth number: 2676
Equipment for surface treatment of semiconductor wafers (etching, plating, cleaning, drying) with standardized machines or customized equipment.
Booth number: 2579
SPEKTRA equips customers worldwide with high-precision primary+secondary calibration systems. We also develop optimized digital test solutions for major MEMS sensor manufacturers.
Booth number: 2776
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