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German Pavilion at
SEMICON China 2019

What is German Pavilion?

20 – 22 March 2019 – Shanghai, P. R. China

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German Exhibitors

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AP&S International GmbH

AP&S provides batch- and single wafer wet process solutions including manual, semi- and fully automated equipment.

Booth number: 2579

Lapmaster Wolters GmbH

Lapmaster Wolters offers a wide range of processing machines for high precision surface finishing.

Booth number: 2687

LPKF Laser & Electronics AG

LPKF develops and produces precision machines and technologies for material processing, originally for the production of circuit board prototypes.

Booth number: 2683

MCRT Micro Cleanroom Technology GmbH

The MCRT is one of today’s leading providers of outstanding contamination control solutions for semi-, micro- and nano-technology.

Booth number: 2670

Meyer Burger (Germany) GmbH

Meyer Burger is a global leading technology company specializing on innovative systems and processes based on semiconductor technologies.

Booth number: 2671


MUEGGE is a leading supplier of scalable plasma technology for Photovoltaic, Flat Panel Display and Semiconductor applications.

Booth number: 2671

Precision Surfacing Solutions GmbH & Co. KG

One group, seven strong brands, one promise: efficient, technologically-leading machine and process solutions for high precision surface finishing.

Booth number: 2687


PROAUT TECHNOLOGY is specialized in creating solutions for process automation matching customers’ requests. For the Wafer Back End area we have several different standard machines.

Booth number: 2575

ProTec Carrier Systems GmbH

ProTec® - The Gripper for touchless gripping by electrostatic energy field. Based on electrostatic forces we chuck various kinds of substrates, e.g. glass, foil, silicon.

Booth number: 2573

Raith China Co.,Ltd.

Raith offers an intern. service and support structure,the best solutions for EBL, FIB-SEM nanofabrication, IC reverse engineering and life sciences applications.

Booth number: 2685

RENA Technologies GmbH

Equipment for surface treatment of semiconductor wafers (etching, plating, cleaning, drying) with standardized machines or customized equipment.

Booth number: 2675

Singulus Technologies AG

SINGULUS TECHNOLOGIES builds machines for solar, semiconductor, medical, consumer goods, optical disc including deposition, surface processing, wet-chemical and heat treatment.

Booth number: 2774

Stratus Vision GmbH

Stratus Vision GmbH designs and produces AOI (Automated Optical Inspection) systems and technology since 2003. We also cooperate with Leica for high precision wafer inspection.

Booth number: 2679

UniTemp GmbH

We develop fast ramping laboratory ovens and high precision hot plates, reflow solder ovens, high vacuum MEMS sealers and Semiautomatic wire bonders.

Booth number: 2776

Vistec Electron Beam GmbH

Vistec provides leading technology solutions for advanced e-beam lithography. The VSB-systems are mainly utilized for semiconductor applications, advanced research & optics.

Booth number: 2577

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