SONOSYS Ultraschallsysteme GmbH

www.sonosys.de

SONOSYS® offers highly sophisticated ultrasonic and megasonic cleaning systems for single-wafer and batch processes in the frequency range from 400 kHz to 9 MHz.

About us

SONOSYS® is specialized in the development, manufacturing and distribution of highly sophisticated Ultrasonic/Megasonic systems for single-wafer and batch processes, in the frequency range from 400 kHz to 9 MHz. SONOSYS® Ultrasonic/Megasonic systems provide highly efficient removal of particles down to the nano range from substrates with fragile surfaces, such as Wafers, Flat Panel Displays, Masks, Micro Systems or special parts within the LIGA-Technique. Our main markets • Semiconductor • Micro/Nano Technology • MEMS • Hard Disc Drives • Photovoltaics • Optical Industry • Food Industry • Sonochemistry • Research Institutes Our main applications • Particle Removal • SC1 Cleaning • Resist Removal • Wet Etching • Post CMP Cleaning • Acoustical Chemical Enhancement Available SONOSYS® systems: • Megasonic tanks • Transducer plates • Submersible transducers • Face-to-face transducers • Megasonic single/dual nozzle • Shower nozzles • Megasonic generators • Atomizers

Address
SONOSYS Ultraschallsysteme GmbH
Daimlerstr. 6
75305 Neuenbürg
Germany

Phone: +49 7082 791840
Fax: +49 7082 7918499
Internet: www.sonosys.de

Contact person

Ralf Emberger
Sales Manager
Phone: +49 7082 7918418
Steven Huang (黄成)
Technical Sales Engineer
Phone: +86 1580 2880790
Representative
ASTRONICS TECHNOLOGIES PRIVATE LTD
No 86. 1st Section Renmin Nan Road
610016 Chengdu
P. R. China

Phone: +86 28 83352813
Internet: www.astronics.sg

Products and Services

SONOSYS® Megasonic systems provide highly efficient removal of nano sized particles from substrates, semiconductor wafers, masks, MEMS and LIGA.
Available products: Transducer plates, submersible transducer, Face-To-Face transducer, single and dual nozzles, atomizer and very compact, modular generators up to 2000 Watt.

Single and dual nozzles
The Megasonic single and dual shower nozzles (400kHz to 9 MHz) transmits the sonic wave into the flowing water and its surface. With up to 35 W concentrated on a small point of only 4 mm results in superb results in contactless cleaning. The dual nozzle works with two distinct frequencies and provides removal of a wider range of particles.

Submersible Transducers
400 kHz to 2 MHz
The SONOSYS® submersible transducers can be used with any vessel and medium and offer maximum flexibility. Made of stainless steel of PVDF in different sizes (4”, 6” or 8”) and with different frequencies (at power up to 2000 W) they fit many applications and set-ups
Megasonic Single-/Dual-/Triple nozzle systems

The Megasonic single, dual and triple nozzles (400kHz to 9 MHz) transmit the sonic wave into the flowing water and its surface. With up to 35 W concentrated on a small point of only 4 mm results in superb results in contactless cleaning. The dual nozzle works with two distinct frequencies and provides removal of a wider range of particles.

The Megasonic nozzles are used in cleaning of single wafers, masks, LCD panels and substrates.

Further reading

Submersible Transducers

The SONOSYS® submersible transducers can be used with any vessel and medium and offer maximum flexibility. Made of stainless steel of PVDF in different sizes (4”, 6” or 8”) and with different frequencies (at power up to 2000 W) they fit many applications and set-ups.

Further reading

News & Innovations

SONOSYS® presents the world's first triple Megasonic nozzle
The world's first triple Megasonic nozzle is introduced this year by SONOSYS®. The new, innovative nozzle can combine three frequencies in the range between 1MHz and 9MHz and with this provide the cleaning of even smaller particles (down to a few nanometer) with no or little pattern damage. The new nozzle will be in addition to the existing single and dual nozzle systems. Further reading

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