ALPHA PLASMA is a supplier of microwave plasma systems to the semiconductor and optoelectronics industries. Long-term experience in sales and manufacturing makes ALPHA PLASMA an ideal partner for the rapidly changing world of electronics. We specialize in Microwave Plasma for MEMS fabrication, wafer ashing processes and optical communication module industries.
ALPHA PLASMA is represented through a worldwide network of partners, in particular in South East Asia and China. We are present through Alpha Plasma Asia in Singapore as well as through China-based companies.
The product portfolio of Alpha Plasma comprises batch plasma systems and automated equipment for processing of individual substrates, wafers and devices. The Internet of Things drives us to the evolving market of optoelectronics.
ALPHA ASTRO PACTO is our latest model uniquely designed for both manual and fully automated handling system for both wafers and chip packaging applications. With direct contact heating/ cooling chuck, the system is most suitable to process wafers that needs precision temperature control. With robotic arms, this system can handle up to 12” wafers. For chip packaging, this system handles up to 9 pcs of 100 mm wide lead frames. The ASTRO PACTO can also fit into an in-line production module.
The ALPHA PLASMA Q Series comprises Microwave Plasma batch ashers for fast and damage-free photo resist stripping. Q 235 is hereby an example from the menu of these ALPHA tools. The unbeatable feature of the Q Series is their DESCUM process, which can meet the most stringent requirements for uniformity. Fast PR stripping is standard also. On top, when equipped with a hot wafer chuck the Alpha Plasma Q Series is also used with demanding single wafer applications such as PI removal or others.
The ALPHA PLASMA Microwave Cleaner AL 76 Compact Is truly an all-rounder. It’s special strength, however, is to clean high-brightness LED’s as well as wafers in MEMS production and niche markets. When equipped with Alpha’s unique ECR mode, AL 76 Compact is running 24/7 mass production in LED assembly. When equipped with a “hot” or “cold” wafer chuck, it is used for removal of SU-8 in MEMS technology as well as for the removal of other thick resists at unparalleled uniformity and etch rate.