RENA Technologies GmbH

Booth number 2671

www.rena.com

Equipment for surface treatment of semiconductor wafers (etching, plating, cleaning, drying) with standardized machines or customized equipment.

About us

Innovative solutions for semiconductor production

As a global leader in technology, RENA Technologies GmbH offers integrated production systems for wet chemical surface treatment. This encompasses automatic and manual wet processing systems for producing semiconductor products for all manner of different sectors. These innovative solutions can be used in FEOL and BEOL applications to produce prime wafers, chips, and MEMS, to plate all manner of different substrates, and for reel-to-reel processing.

Address
RENA Technologies GmbH
Höhenweg 1
78148 Gütenbach
Germany

Phone: +49 7723 9313-0
Fax: +49 7723 9313-50
Internet: www.rena.com

Products and services

Automatic and manual wet processing systems

RENA’s manual wet processing systems support small- and very small-scale production of chips in accordance with precisely adjustable and logged process parameters. This allows them to supply research departments with key figures for developing new products and meeting individual customer requirements.

RENA’s automatic wet processing systems support continuous series production of chips and MEMS with a process guarantee. The innovative production machinery handle all wet processes for front-end-of-line (FEOL) and back-end-of-line (BEOL) production.

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