PVA TePla is an association of diverse high-tech companies that operate worldwide. Backed by decades of experience and an eye for the innovations of tomorrow, we develop unrivaled systems for vacuum, high-temperature, and plasma processes as well as for quality inspections—always in close cooperation with our customers.
For more than 60 years, PVA Crystal Growing Systems supports our customers in the production of high-purity monocrystals (Si, SiC, Ge, GaAs, InP). More than 1000 of our customized systems were sold to the semiconductor, photovoltaics, electronics and R&D industries.
PVA Software Production Automation offers customized optical wafer inspection systems with machine vision, deep learning technologies and SECS GEM automation. Furthermore providing standalone software and data management solutions for our customers' semiconductor machine park.
The system is designed for the production of silicon carbide (SiC) crystals by physical vapor transport (PVT). The system uses a induction coil in the kilohertz range designed for low energy consumption. The possible size of substrate is 4'' - 6''. Due to a high degree of automation and a compact footprint, the system is optimized for mass production. Additionally available are a mobile loading and unloading cart, and other modular options - e.g. vacuum pumps and measuring devices.
Our sophisticated Czochralski-Puller for the mass production of silicon crystals up to 12". The modular configuration allows the system to be tailored to our customers' needs. Thus, the system can be equipped e.g. with a magnet.