About us

sentronics metrology provides metrology products focused on providing quality control and assurance for wafers & semiconductors based on optical interferometry, which permits extremely fast and highly accurate determination of layer thicknesses and 3-dimensional surface topographies, including roughness and thicknesses.

Products and services

Laser groove analysis with sub-μm accuracy and repeatability
Non-contact 2D roughness measurement down to the sub-nm Ra scale for all etch, grind and polish processes
Substrate thickness and TTV for framed wafers before and after dicing
Warp & thickness of blank and product wafers with and without BG-tape
Single layer measurements on multi-layer samples such as bonded wafers and all types of wafer level packaging devices
Multi layer and total thickness measurements on wafer stacks

Pre-sales

Application optimization together with our customers
Service measurements

Service & Support

Remote access
Technical support
Special feature support
Warranty and service contracts

After-sales

Repair and calibration service
Training
System Upgrades

SemDex M

SemDex M is the Base Platform for a Wide Range of Semiconductor Metrology Applications with the Capability to be upgraded into a Fully-Automated System.
Benefits:
• Modular, upgradable system
• Multiple metrology applications integrated into one tool
• Flexible configuration solutions for all handling requirements
• On-site automation upgrade for semi-automated systems

SemDex A

SemDex A is a fully-automated metrology system with multi sensor configuration for a wide range of semiconductor applications:
• Fully-automated laser groove analysis with sub-μm accuracy and repeatability
• Non-contact 2D roughness measurement
• Substrate thickness and TTV
• Warp & thickness
• Single layer measurements on multi-layer samples
• Multi layer and total thickness measurements on wafer stacks

Address
sentronics metrology GmbH
Dudenstr. 27 – 35
68167 Mannheim
Germany

Phone: +49 621 84251-0
Fax: +49 621 84251-200
Internet: www.sentronics-metrology.com
E-mail: Send message

Contact person

Christof Ruef
President
Phone: +49 621 842510
E-mail: Send message

Click here if you notice an image that violates copyright or privacy rights.

Get in contact
OK

We use cookies and the web analysis tool Matomo in order to optimally design and continuously improve our website for you. By continuing to use our website, you agree to this. Further information and an objection possibility can be found here: Data protection