About us

The MCRT Micro CleanRoom Technology GmbH is a German company located north of Frankfurt. It was founded in 1999. With 40 employees MCRT is one of today’s leading providers of clean room and contamination control solutions for semiconductor, micro-electronics and nano-technology. As a result of great expertise in design of ultra-clean minienvironments (ISO 1) for semiconductor process, storage and metrology systems, the MCRT as OEM is delivers components and know-how worldwide. Moreover the MCRT creates new concepts for air-conditioned minienvironments with temperature control (< +- 0.1 K). It also models solutions for the usage of extreme dry atmospheric air (XCDA, < 3% rel. H.) or inert gas atmospheres (< 1 ppm of oxygen and humidity). Each concept is individual and customized. It fits best into the given requirements for cleanliness and contamination control. To find the most suitable perception for you, qualified specialists gladly answer your questions.

Products and services

The MCRT offers the following products and services: design and manufacturing of customized minienvironments for semiconductor process, storage and metrology systems customized filter-fan-units for cleanrooms and clean production environments atmospheric or inert air-conditioned cleanroom solutions for semiconductor, nano-, and OLED-technology customized AMC-filters with replaceable filter materials for lithography applications consultancy for contamination control and cleanroom solutions
MCRT AMC filters

Customized airborne molecular filters with replaceable filter material

Further reading

MCRT minienvironments and customized filter-fan-units

Especially designed minienvironments and customized filter-fan-units for usage in semiconductor systems and cleanrooms.

Further reading

MCRT enclosures for lithography and metrology systems

Adapted minienvironment for e-beams, lasers, lithography and metrology systems with requirements to cleanliness, inert atmosphere and environmental parameter control.

Further reading

Ludwig-Rinn-Str. 14 – 16
35452 Heuchelheim

Phone: +49 641 94886-0
Fax: +49 641 94886-25
Internet: www.mcrt.de
E-mail: Send message

Contact person

Dr. Maximilian Dobler
Sales Manager
Phone: +49 151 21250429
E-mail: Send message

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