IDE – Environmental Control & Automation
The Integrated Dynamics Engineering (IDE) Group is a worldwide leader in developing and manufacturing environmental controls for active and passive vibration isolation, EMI active compensation, and acoustic isolation for research, metrology, lithography and medical systems; plus precision motion controls and robots for wafer and mask handling, tool platforms and EFEMs for semiconductor OEMs. Starting with unique active and passive vibration isolation systems, IDE expanded its product array to include a range of solutions for the most demanding industries in the instrumentation and metrology fields.
IDE focuses on the important challenges that drive today’s semiconductor equipment design. With shrinking process geometries, new structural elements and a major increase in substrate size, the challenges to improving process yield and overall throughput have increased exponentially. Today’s semiconductor OEM’s need partners that are technology leaders and are responsive to their business needs. IDE understands doubling the throughput at double the cost does not make a good investment. IDE’s broad technology portfolio and understanding of your system dynamics allow value engineering of the right solution for your equipment design. IDE solutions achieve unparalleled results. Advanced lithography and inspection tools must move faster and have quicker settling time in order to achieve higher throughput.
Active Vibration Isolation Solution for highest throughput metrology, inspection and lithography equipment.
IDE’s MK5 is the most powerful EMI compensation solution available
As proof of its technological leadership, IDE’s MK5 provides the lowest noise level (<0.5nT) and greatest field reduction compensation (up to 55dB) over a broad control bandwidth. Disturbances, both small and large (sensors can be placed in fields up to 400µT), are effectively cancelled to ensure the best image possible, every time. And the performance benefits do not stop there.
Dr. Jin Bereder-Wu
Sales Director Asia
Phone: +86 138 62005494
E-mail: Send message