About us

INNOVAVENT is focused on the development and manufacturing of Laser Optics Systems for Laser Lift Off (LLO), crystallization/annealing (UV-SLA) , dopant activation and contact formation applications, which are integrated by system manufacturers for the display, semiconductor and solar cell industry.

The key competence and products are Line Beam Optics. The focus is on applications of solid state lasers at 266nm, 343nm, 355nm, 515nm, 532nm, 808nm and 1064nm for thermal processes from cw to the ms and ns range and Laser Lift Off. Most of these applications involve silicon and other semiconductor materials: activation of dopants for CMOS image sensors and IGBT power devices as well as laser treatment of thin films for 3-dimensional circuits. LLO is applied for flexible OLED displays and other flex electronics.

Products and services

Line Beam VOLCANO LB 750UV-2-8340 UV Laser Optics for Laser-Lift-Off (LLO) applications for flexible displays, Flex Electronics.

Line Beam VOLCANO semi

  • UV Laser Optics for Laser Lift Off (LLO) and Laser Induced Forward Transfer (LIFT) of GaN microLED displays
  • UV and green Laser Optics for dopant activation and contact formation on high power semiconductor electronics.

Line Beam VOLCANO LB 750UV-4-8340SLA UV Laser Optics for
LTPS (low temperature poly silicon) TFT back plane manufacturing of flexible OLED displays.

Reinhard-Rube-Str. 4
37077 Göttingen

Phone: +49 551 90047-0
Fax: +49 551 90047-19
Internet: www.innovavent.com
E-mail: Send message

Contact person

Hans-Juergen Kahlert
Managing Director
Phone: +49 551 9004711 / +49 171 7532811
E-mail: Send message

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