sentronics metrology provides metrology products focused on providing quality control and assurance for wafers & semiconductors based on optical interferometry, which permits extremely fast and highly accurate determination of layer thicknesses and 3-dimensional surface topographies, including roughness and thicknesses.
Service & Support
SemDex M is the Base Platform for a Wide Range of Semiconductor Metrology Applications with the Capability to be upgraded into a Fully-Automated System.
• Modular, upgradable system
• Multiple metrology applications integrated into one tool
• Flexible configuration solutions for all handling requirements
• On-site automation upgrade for semi-automated systems
SemDex A is a fully-automated metrology system with multi sensor configuration for a wide range of semiconductor applications:
• Fully-automated laser groove analysis with sub-μm accuracy and repeatability
• Non-contact 2D roughness measurement
• Substrate thickness and TTV
• Warp & thickness
• Single layer measurements on multi-layer samples
• Multi layer and total thickness measurements on wafer stacks
Phone: +49 621 842510
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