About us

sentronics metrology provides metrology products focused on providing quality control and assurance for wafers & semiconductors based on optical interferometry, which permits extremely fast and highly accurate determination of layer thicknesses and 3-dimensional surface topographies, including roughness and thicknesses.

Products and services

  • Laser groove analysis with sub-μm accuracy and repeatability
  • Non-contact 2D roughness measurement down to the sub-nm Ra scale for all etch, grind and polish processes
  • Substrate thickness and TTV for framed wafers before and after dicing
  • Warp & thickness of blank and product wafers with and without BG-tape
  • Single layer measurements on multi-layer samples such as bonded wafers and all types of wafer level packaging devices
  • Multi layer and total thickness measurements on wafer stacks

Pre-sales

  • Application optimization together with our customers• Service measurements

Service & Support

  • Remote access
  • Technical support
  • Special feature support
  • Warranty and service contracts

After-sales

  • Repair and calibration service
  • Training
  • System Upgrades
SemDex M

SemDex M is the Base Platform for a Wide Range of Semiconductor Metrology Applications with the Capability to be upgraded into a Fully-Automated System.
Benefits:
• Modular, upgradable system
• Multiple metrology applications integrated into one tool
• Flexible configuration solutions for all handling requirements
• On-site automation upgrade for semi-automated systems

SemDex A

SemDex A is a fully-automated metrology system with multi sensor configuration for a wide range of semiconductor applications:
• Fully-automated laser groove analysis with sub-μm accuracy and repeatability
• Non-contact 2D roughness measurement
• Substrate thickness and TTV
• Warp & thickness
• Single layer measurements on multi-layer samples
• Multi layer and total thickness measurements on wafer stacks

Address
sentronics metrology GmbH
Mallaustr. 72
68219 Mannheim
Germany

Phone: +49 621 842510
Fax: +49 621 84251200
Internet: www.sentronics-metrology.com
E-mail: Send message

Contact person

Christof Ruef
President
Phone: +49 621 842510
E-mail: Send message

Representative
JC's Chunson Limited
Ma’anshan office
243000
马鞍山市江东大道19号(花山区西湖花园100栋103室)

Phone: + 886-2-3234-1279#112
Internet: www.chunson.com
E-mail: Send message

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