About us

Innovative solutions for semiconductor production

As a global leader in technology, RENA Technologies GmbH offers integrated production systems for wet chemical surface treatment. This encompasses automatic and manual wet processing systems for producing semiconductor products for all manner of different sectors. These innovative solutions can be used in FEOL and BEOL applications to produce prime wafers, chips, and MEMS, to plate all manner of different substrates, and for reel-to-reel processing.

Products and services

Automatic and manual wet processing systems

RENA’s manual wet processing systems support small- and very small-scale production of chips in accordance with precisely adjustable and logged process parameters. This allows them to supply research departments with key figures for developing new products and meeting individual customer requirements.

RENA’s automatic wet processing systems support continuous series production of chips and MEMS with a process guarantee. The innovative production machinery handle all wet processes for front-end-of-line (FEOL) and back-end-of-line (BEOL) production.
Batch S

Wet bench for semiconductor production

RENA’s automatic Batch S wet processing system for wafer and chip production complies with the SEMI standard, meets cleanroom requirements up to ISO class 2, and processes substrates measuring 4" bis 12". Its modular design allows it to be set up and started up in no time at all.

Further reading

EPM

Manual electroplating

RENA EPM systems for manual electroplating boast an optimum flow of fluid and a tight control of the electrical field. They produce a high level of consistency in plating, achieve high and scalable plating rates, and, thanks to their modular design and low floor space, can be adapted to any working environment.

Further reading

Address
RENA Technologies GmbH
Höhenweg 1
78148 Gütenbach
Germany

Phone: +49 7723 9313-0
Fax: +49 7723 9313-50
Internet: www.rena.com
E-mail: Send message

Contact person

Tina Röther
Marketing Manager Print & Event
E-mail: Send message

Representative
Shanghai Rena Trading Co., Ltd.
Shanghai World Plaza, 23 Floor, BlockC&D
855 Pudong South Road, Pudong, 200120 Shanghai
P. R. China

Phone: +86 21 68595889
Fax: +86 21 68595890
Internet: www.rena.com
E-mail: Send message

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