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sentronics metrology GmbH

Booth number: 2571

About us

sentronics metrology GmbH is world leader in non-contact, non-invasive optical metrology. For over ten years sentronics metrology has been developing and marketing metrology tools with multi sensor configurations for seamless monitoring quality processes in the areas of: wafers, coatings and films.

For many well-known manufacturer in the wafer industry, our metrology and inspection systems stand for quality assurance, precision and process security.

Products and services

SemDex M – Modular Optical Semiconductor
Metrology Tool with Multi Sensor Configuration

The flexible SemDex M is the base platform for a wide range of semiconductor metrology applications. Diverse measurement configurations and handling options are possible using different sensors, measurement stages and automation hardware.

SemDex M

SemDex M

SemDex A

SemDex A

SemDex A – Automated Optical Semiconductor
Metrology Tool with Multi Sensor Configuration
SemDex A provides reliable, high-precision measurements of wafer and multi-layer thickness, bow, warp or roughness with flexible handling options.


sentronics metrology GmbH
Mallaustr. 72
68219 Mannheim

Phone: +49 621 84251-0
Fax: +49 621 84251-200

Yannick Zimmer
Application Engineer
Phone: +49 621 84251-260

JC’s Chunson Limited
No. 19, Jiangdong Avenue, Ma’anshan City, City, China Room 103, Building 100, Xihu Garden, Huashan District
243000 马鞍山市江东大
P. R. China

Phone: +86 189 55540168

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Booth number: 2673
ATT Systems GmbH
Booth number: 2770