The EBPG5200 high-performance nanolithography system enables up to 8-inch capability at 100kV. It offers full automation and high resolution to generate leading-edge lithography for both operations at centers of excellence and semiconductor fabrication.
Speed up! Fast, smart, innovative, and economical
With its innovative architecture, attractive cost of ownership, and specifications designed to deliver maximum accuracy at fast writing speed, the VOYAGER nanolithography system lowers the entrance barriers for high-speed Electron Beam Lithography.
Raith China Co., Ltd.
No.30 Xue Yuan Road, Haidian District
P. R. China
Phone: +86 10 82867921
Fax: +86 10 82867919
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