Logo Made in Germany SEMICON China 2018

Raith China Co., Ltd.

Booth number: 2776

About us

Raith is a leading technology manufacturer for electron beam lithography and focused ion beam nanofabrication instruments. In addition to this expertise in nanofabrication, Raith technology is employed for IC reverse engineering, IC layout reconstruction, and large area imaging in life sciences. Be at the top of the game in your area of expertise, and choose the best Raith solution to realize your application.

Products and services

  • EBPG5200 / EBPG5150
  • Ultra high Performance Electron Beam Lithography
  • new class of Electron Beam Lithography Technology
  • RAITH150 Two Raith's environmentally tolerant, ultra-high Resolution direct write System
  • eLINE Plus
  • the swiss army knife for nanofabrication
  • PIONEER Two top Technology for the best of both worlds: EBL and imaging in a single System
  • ELPHY the easiest and most economical Access to professional nanolithography and nanofabrication
  • CHIPSCANNER the Raith solution for chip design recovery, layout reconstruction, anti-counterfeiting, and IP protection


The EBPG5200 high-performance nanolithography system enables up to 8-inch capability at 100kV. It offers full automation and high resolution to generate leading-edge lithography for both operations at centers of excellence and semiconductor fabrication.



Speed up! Fast, smart, innovative, and economical

With its innovative architecture, attractive cost of ownership, and specifications designed to deliver maximum accuracy at fast writing speed, the VOYAGER nanolithography system lowers the entrance barriers for high-speed Electron Beam Lithography.


Raith China Co., Ltd.
No.30 Xue Yuan Road, Haidian District
100083 Beijing
P. R. China

Phone: +86 10 82867921
Fax: +86 10 82867919

Truman Zhu
Sales Manager
Phone: +86 186 21956092

Raith GmbH
Konrad-Adenauer-Allee 8
44263 Dortmund

Phone: +49 231 95004-0
Fax: +49 231 95004-460

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Booth number: 2673
ATT Systems GmbH
Booth number: 2770