Logo Made in Germany SEMICON China 2018

Fraunhofer Institute for Electronic Nano Systems ENAS

Booth number: 2677

About us

The particular strength of the Fraunhofer ENAS lies in the development of smart systems for various applications. These systems combine electronic components with nano and micro sensors as well as actuators, communication units and self-sufficient power supply. Furthermore, smart systems are equipped with the ability to respond to each other, to identify one another and work in consortia. Hence, they form the base for the internet of things.

The research and product portfolio covers single components, manufacturing technologies and system concepts, system integration technologies and transfers them into production. Fraunhofer ENAS offers research and development services from the idea, via design and technology development or realization based on established technologies up to tested prototypes. If standard components do not meet the requirements, Fraunhofer ENAS provides prompt help in the realization of innovative and marketable products and helps to transfer them into production.

Products and services

  • Optical sensor system monitoring the quality of electroplating solutions 
  • High-precision inertial sensors (acceleration, inclination, vibration, gyroscopes)
  • Nanostructured and nanoparticle-based sensors 
  • Low-temperature waferbonding technologies  
  • 3D integration technologies
Optical sensor system for liquid monitoring. (Image © Fraunhofer ENAS)

Optical sensor system for liquid monitoring. (Image © Fraunhofer ENAS)

The Fraunhofer ENAS exhibits a monitoring system for quality control of liquid solutions, e.g. process liquids, at SEMICON China 2018. It quantify essential ingredients of specific liquid solutions. By detecting a deviation to the predetermined parameters, the consistence of the solution can be regulated directly. The sensor system works autonomously with short measurement times and can be adapted to different applications.

News & Innovations

Fraunhofer ENAS presents at the CSTIC 2018  Visit our oral presentation
"Nanostructures for smart systems"
Ray Saupe, Fraunhofer ENAS

at China Semiconductor Technology International Conference - CSTIC 2018
on Sun, March 11, 2018, 3.55 pm

Shanghai International Convention Center
Room: 3I+3J
Symposium VIII: MEMS, Sensors and Emerging Semiconductor Technologies
Session II: Semiconductor Technology in Healthcare


Fraunhofer Institute for Electronic Nano Systems ENAS
Technologie-Campus 3
09126 Chemnitz

Phone: +49 371 45001-0
Fax: +49 371 45001-101

Thomas Otto
Phone: +49 371 45001-100

Fraunhofer ENAS c/o German Industry and Commerce (Taicang) Co. Ltd. Shanghai Branch
Gopher Center, 757 Mengzi Road, Puxi, Huangpu District
Shanghai 200023
P. R. China

Phone: +86 21 68758536 ext. 1632
Fax: +86 21 68758573 ext. 5632

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Booth number: 2673
ATT Systems GmbH
Booth number: 2770