Logo Made in Germany SEMICON China 2018

Vistec Electron Beam GmbH

Booth number: 2676

About us

As a long-standing equipment supplier, Vistec Electron Beam GmbH is providing leading technology solutions for advanced electron-beam lithography. Based on the Variable Shaped Beam (VSB) principle, the electron-beam lithography systems are mainly utilized for semiconductor applications and advanced research as silicon direct write, compound semiconductor, mask making as well as integrated optics and several new emerging markets. The company is located in Jena, Germany. In addition to its production facility in Germany, Vistec Electron Beam maintains service and support centers in Europe, Taiwan and in the US. You will find more information about Vistec Electron Beam at:

Products and services

Vistec Electron Beam GmbH develops, manufactures, sales & services 50kV Variable Shaped Beam lithography systems, which serve customers in both, semiconductor industry as well as advanced research, optics and several emerging markets.
The portfolio covers a wide range of universal platforms of 200mm & 300mm travel range.
At this year’s Semicon China the Vistec SB250 & SB3050 series are presented.

Vistec SB250
The E-Beam writers are universal, cost effective tools for both direct write & mask making applications to allow customers to react quickly to market demands.

Vistec SB3050
The Vistec SB3050 series is our commitment to semiconductor manufacturing professionals. The system can also be used for advanced optical applications.

Vistec SB3050 series

Vistec SB3050 series

The Vistec SB3050 series - with a Cell Projection option - is our commitment to semiconductor manufacturing professionals. Designed to meet the challenges of direct patterning down to the 32nm technology node, it features Variable Shape Beam (VSB) technology with vector scan and continuously moving stage principles for throughput optimization.

Our industry proven 300mm design concept has been successfully utilized in more than 10 installations worldwide.

Vistec SB250 series

Vistec SB250 series

The Vistec SB250 electron beam lithography system has been designed as a universal and cost-effective tool for both direct write and mask making applications to allow the customers to react quickly to market demands.


Vistec Electron Beam GmbH
Ilmstr. 4
07743 Jena

Phone: +49 3641 79980
Fax: +49 3641 7998222

Ines Stolberg
Manager Product Management & Marketing
Phone: +49 3641 79980

Scientech Engineering Corporation (Shanghai)
22A, Suntime International Building, 450 Fushan Road
200122 Shanghai
P. R. China

Phone: +86 21 58200880
Fax: +86 21 58200368

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