Logo Made in Germany SEMICON China 2018

Singulus Technologies AG

Booth number: 2577

About us

Innovations for New Technologies

SINGULUS TECHNOLOGIES builds machines for economical and resource-efficient production processes for solar, semiconductor, medical technology, consumer goods and optical disc. The application areas include coating technology, surface processing, wet-chemical applications as well as the related chemical and physical processing steps. For all machines, processes and applications SINGULUS draws upon its know-how in the areas of automation and process technology. SINGULUS is a renowned manufacturer of advanced thin-film deposition equipment for MRAM, thin-film head, and other semiconductor applications. The systems offer a reliable deposition of ultra-thin metallic and insulating films down to a thickness of one nanometer and below and stacks of such films with very precise material thickness and high uniformity specifications. SINGULUS is the trusted partner in the respective industry and extends its leadership in the thin-film deposition technology for semiconductor applications.

Products and services

Vacuum Sputtering System ROTARIS for R & D and Pilot production
Ultrahigh Vacuum Deposition Platform TIMARIS
Wet processing systems for Semiconductor fabrication
Utilities for Semiconductor fabrication
Ultrahigh Vacuum Deposition Platform TIMARIS

Ultrahigh Vacuum Deposition Platform TIMARIS

SINGULUS has already established and qualified the second generation of the TIMARIS PVD Cluster Tool platform in the market and is offering a complete portfolio of process modules for different applications. These modules include the Multi-Target-Module (MTM), Oxidation-Process-Module (OPM), Pre-Clean- Module (PCM), Combi-Process-Module (CPM), Four-Target-Module (FTM) and Static-Deposition- Module (SDM) as well as the Rotating-Substrate- Module (RSM).

Universal Sputtering System for Advanced R&D

Universal Sputtering System for Advanced R&D

The ROTARIS ultra-high vacuum system is a modular platform for fast, precise and fully automated thin-film sputter deposition. The ROTARIS is a bridge system for 200 mm and 300 mm wafer processing. Its main deposition chamber RSM (Rotating-Substrate-Module) can house up to 12 physical vapor deposition (PVD) cathodes with a target diameter of 100 mm.

Wet Process Systems for up to 300 mm Semiconductor Applications

Wet Process Systems for up to 300 mm Semiconductor Applications

High-end products in semiconductors like WAFER, MEMS and MRAM. Product range started with manual wet stations for R&D, semi-automated systems and up to fully automated tools for the chemical surface treatment like cleaning, etching and drying.


Singulus Technologies AG
Hanauer Landstr. 103
63796 Kahl am Main

Phone: +49 618 8440612
Fax: +49 618 8440110

Berthold Ocker
Head of Business Unit Semiconductor
Phone: +49 160 1816785


Phone: +86 1382 2138376

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